Academic Thesis

Basic information

Name Kurita Mitsufumi
Belonging department
Occupation name
researchmap researcher code 1000113809
researchmap agency Okayama University of Science

Title

PASを用いた高周波プラズマCVD a-SiC:H薄膜の研究

Bibliography Type

Author

栗田満史、竹中進、中川紀美雄、赤尾文雄

Summary

Magazine(name)

岡山理科大学紀要 第24号A,pp.137-148

Publisher

Volume

Number Of Pages

StartingPage

EndingPage

Date of Issue

1989/00

Referee

Not exist

Invited

Language

Japanese

Thesis Type

Research papers (publications of university or research institution)

ISSN

DOI

NAID

PMID

URL

J-GLOBAL ID

arXiv ID

ORCID Put Code

DBLP ID