Development of Small-sized Servo Valve using Gate Mechanism and Diaphragm
Takumi Kobayashi, Tetsuya Akagi, Shujiro Dohta, Takashi Shinohara, So Shimooka
JFPS International Journal of Fluid Power System
Vol.14
No.1
1
9
https://doi.org/10.5739/jfpsij.14.1