Academic Thesis

Basic information

Name Hirano Hiroyuki
Belonging department
Occupation name
researchmap researcher code 1000215136
researchmap agency Okayama University of Science

Title 

The Effect of the Electric Field on the Deposition Rate of Fine Particles onto the Heated Wafer

					

					

						

							

								

									
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Author 

									
								

							

						

						
Hiroyuki Hirano and Hiroyuki Ozoe

					

					

						

							

								

									
Summary 

									
								

							

						

						
numerical fluid dynamics,Brawnian pariticle

the 2nd JSME-KSME Thermal Engineering Conference



					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Proceedings of the 2nd JSME-KSME Thermal Engineering Conference Vol.3, pp.(3-)131-136

					

					

						

							

								

									
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1992/10

					

					

						

							

								

									
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English

					

					

						

							

								

									
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Research papers (academic journals)

					

					

						

							

								

									
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