Bibliography

Basic information

Name Muramoto Tetsuya
Belonging department
Occupation name
researchmap researcher code 1000311528
researchmap agency Okayama University of Science

Book Title 

Reactive Sputter Deposition

					

					

						

							

								

									
Sole or Joint Author 

									
								

							

						

						
Multiple author

					

					

						

							

								

									
Author 

									
								

							

						

						

					

					

						

							

								

									
Summary 

									
								

							

						

						
Sputtering, Simulation

					

					

						

							

								

									
Bibliography Category 

									
								

							

						

						
Books (academic)

					

					

						

							

								

									
PartArea 

									
								

							

						

						
Simulation of the Sputtering Process

					

					

						

							

								

									
PageRange 

									
								

							

						

						

					

					

						

							

								

									
Publication Office 

									
								

							

						

						
Springer

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2008/01

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						

					

					

						

							

								

									
Language 

									
								

							

						

						
English

					

					

						

							

								

									
ASIN 

									
								

							

						

						

					

					

						

							

								

									
ISBN 

									
								

							

						

						

					

					

						

							

								

									
URL・LINK