Academic Thesis

Basic information

Name Muramoto Tetsuya
Belonging department
Occupation name
researchmap researcher code 1000311528
researchmap agency Okayama University of Science

Title 

MD study on temperature dependence of sputtering yield

					

					

						

							

								

									
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Author 

									
								

							

						

						
T. Muramoto

					

					

						

							

								

									
Summary 

									
								

							

						

						
Sputtering; Temperature dependence; Sputtered cluster; MD simulation

9th International Conference on Computer Simulation of Radiation Effects in Solids



					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Nuclear Instruments and Methods in Physics B

					

					

						

							

								

									
Publisher 

									
								

							

						

						
Elsevier

					

					

						

							

								

									
Volume 

									
								

							

						

						
267

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						
18

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
3232

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
3234

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2009/02

					

					

						

							

								

									
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Language 

									
								

							

						

						
English

					

					

						

							

								

									
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