Academic Thesis

Basic information

Name Sato Yasushi
Belonging department
Occupation name
researchmap researcher code 6000010708
researchmap agency Okayama University of Science

Title 

Oxidation Resistance of Ti?Si?N and Ti?Al?Si?N Films Deposited by Reactive Sputtering Using Alloy Targets

					

					

						

							

								

									
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Author 

									
								

							

						

						
12.	K. Takahashi, N. Oka, M. Yamaguchi, Y. Seino, K. Hattori, S. Nakamura, Y. Sato, and Y. Shigesato

					

					

						

							

								

									
Summary 

									
								

							

						

						


Oxidation Resistance of Ti?Si?N and Ti?Al?Si?N Films Deposited by Reactive Sputtering Using Alloy Targets
12. K. Takahashi, N. Oka, M. Yamaguchi, Y. Seino, K. Hattori, S. Nakamura, Y. Sato, and Y. Shigesato

					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
 Japanese Journal of Applied Physics

					

					

						

							

								

									
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Volume 

									
								

							

						

						
50

					

					

						

							

								

									
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7R

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
075802_1

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
075802_5

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2011/07

					

					

						

							

								

									
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Language 

									
								

							

						

						
English

					

					

						

							

								

									
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Research papers (academic journals)

					

					

						

							

								

									
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