Academic Thesis

Basic information

Name Sato Yasushi
Belonging department
Occupation name
researchmap researcher code 6000010708
researchmap agency Okayama University of Science

Title 

Effects of Energetic Ion Bombardment on Structural and Electrical Properties of Al-Doped ZnO Films Deposited by RF-Superimposed DC Magnetron Sputtering

					

					

						

							

								

									
Bibliography　Type 

									
								

							

						

						

					

					

						

							

								

									
Author 

									
								

							

						

						
N. Ito, N. Oka, Y. Sato, and Y. Shigesato

					

					

						

							

								

									
Summary 

									
								

							

						

						


Effects of Energetic Ion Bombardment on Structural and Electrical Properties of Al-Doped ZnO Films Deposited by RF-Superimposed DC Magnetron Sputtering


					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
 Japanese Journal of Applied Physics

					

					

						

							

								

									
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Volume 

									
								

							

						

						
49

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						
7R

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
071103_1

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
071103_5

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2010/07

					

					

						

							

								

									
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Not exist

					

					

						

							

								

									
Language 

									
								

							

						

						
English

					

					

						

							

								

									
Thesis　Type 

									
								

							

						

						
Research papers (academic journals)

					

					

						

							

								

									
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