Academic Thesis

Basic information

Name Sato Yasushi
Belonging department
Occupation name
researchmap researcher code 6000010708
researchmap agency Okayama University of Science

Title 

High rate reactive magnetron sputter deposition of Al-doped ZnO (AZO) with unipolar pulsing and impedance control system

					

					

						

							

								

									
Bibliography　Type 

									
								

							

						

						

					

					

						

							

								

									
Author 

									
								

							

						

						
Y. Nishi, K. Hirohata, N. Tsukamoto, Y. Sato, N. Oka, and Y. Shigesato

					

					

						

							

								

									
Summary 

									
								

							

						

						


High rate reactive magnetron sputter deposition of Al-doped ZnO (AZO) with unipolar pulsing and impedance control system


					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Journal of Vacuum Science & Technology A

					

					

						

							

								

									
Publisher 

									
								

							

						

						

					

					

						

							

								

									
Volume 

									
								

							

						

						
28

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						
4

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
890

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
894

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2010/07

					

					

						

							

								

									
Referee 

									
								

							

						

						
Exist

					

					

						

							

								

									
Invited 

									
								

							

						

						
Not exist

					

					

						

							

								

									
Language 

									
								

							

						

						
English

					

					

						

							

								

									
Thesis　Type 

									
								

							

						

						
Research papers (academic journals)

					

					

						

							

								

									
ISSN 

									
								

							

						

						

					

					

						

							

								

									
DOI 

									
								

							

						

						

					

					

						

							

								

									
NAID 

									
								

							

						

						

					

					

						

							

								

									
PMID 

									
								

							

						

						

					

					

						

							

								

									
URL 

									
								

							

						

						

					

					

						

							

								

									
J-GLOBAL ID 

									
								

							

						

						

					

					

						

							

								

									
arXiv ID 

									
								

							

						

						

					

					

						

							

								

									
ORCID Put Code 

									
								

							

						

						

					

					

						

							

								

									
DBLP ID