Academic Thesis

Basic information

Name Sato Yasushi
Belonging department
Occupation name
researchmap researcher code 6000010708
researchmap agency Okayama University of Science

Title 

In-situ analyses on negative ions in the sputtering process to deposit Al-doped ZnO films

					

					

						

							

								

									
Bibliography　Type 

									
								

							

						

						

					

					

						

							

								

									
Author 

									
								

							

						

						
N. Tsukamoto, D. Watanabe, M. Saito, Y. Sato, N. Oka, and Y. Shigesato

					

					

						

							

								

									
Summary 

									
								

							

						

						


In-situ analyses on negative ions in the sputtering process to deposit Al-doped ZnO films


					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Journal of Vacuum Science & Technology A

					

					

						

							

								

									
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Volume 

									
								

							

						

						
28

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						
4

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
846

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
850

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2010/07

					

					

						

							

								

									
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Exist

					

					

						

							

								

									
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Not exist

					

					

						

							

								

									
Language 

									
								

							

						

						
English

					

					

						

							

								

									
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Research papers (academic journals)

					

					

						

							

								

									
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