Academic Thesis

Basic information

Name Sato Yasushi
Belonging department
Occupation name
researchmap researcher code 6000010708
researchmap agency Okayama University of Science

Title 

Dc sputter deposition of amorphous indium-gallium-zinc-oxide (a-IGZO) films with H2O introduction

					

					

						

							

								

									
Bibliography　Type 

									
								

							

						

						

					

					

						

							

								

									
Author 

									
								

							

						

						
T. Aoi, N. Oka, Y. Sato, R. Hayashi, H. Kumomi, and Y. Shigesato

					

					

						

							

								

									
Summary 

									
								

							

						

						

Transparent Oxides for Electronics and Optiocs (TOEO-6)
Dc sputter deposition of amorphous indium-gallium-zinc-oxide (a-IGZO) films with H2O introduction


					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Thin Solid Films

					

					

						

							

								

									
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Volume 

									
								

							

						

						
518

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						
11

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
3004

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
3007

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2010/03

					

					

						

							

								

									
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Not exist

					

					

						

							

								

									
Language 

									
								

							

						

						
English

					

					

						

							

								

									
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