Dc sputter deposition of amorphous indium-gallium-zinc-oxide (a-IGZO) films with H2O introduction
単著・共著の別
著者
T. Aoi, N. Oka, Y. Sato, R. Hayashi, H. Kumomi, and Y. Shigesato
概要
Transparent Oxides for Electronics and Optiocs (TOEO-6)
Dc sputter deposition of amorphous indium-gallium-zinc-oxide (a-IGZO) films with H2O introduction