Al-doped ZnO (AZO) films deposited by reactive sputtering with unipolar pulsing and plasma emission control systems

K. Hirohata, Y. Nishi, N. Tsukamoto, N. Oka, Y. Sato, I. Yamamoto, and Y. Shigesato

Transparent Oxides for Electronics and Optiocs (TOEO-6)
Al-doped ZnO (AZO) films deposited by reactive sputtering with unipolar pulsing and plasma emission control systems

Thin Solid Films

518

11

2980

2983