Al-doped ZnO (AZO) films deposited by reactive sputtering with unipolar pulsing and plasma emission control systems
単著・共著の別
著者
K. Hirohata, Y. Nishi, N. Tsukamoto, N. Oka, Y. Sato, I. Yamamoto, and Y. Shigesato
概要
Transparent Oxides for Electronics and Optiocs (TOEO-6)
Al-doped ZnO (AZO) films deposited by reactive sputtering with unipolar pulsing and plasma emission control systems