Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Influeence of amorphous carbon film deposition on source gases

					

					

						

							

								

									
Author 

									
								

							

						

						

					

					

						

							

								

									
Journal 

									
								

							

						

						
Plasma Science Syimposium 2009 / The 26th Symposium on Plasma Processing (SPP-26)

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2009/02

					

					

						

							

								

									
Invited 

									
								

							

						

						

					

					

						

							

								

									
Language 

									
								

							

						

						

					

					

						

							

								

									
  

									
								

							

						

						

					

					

						

							

								

									
Conference Class 

									
								

							

						

						

					

					

						

							

								

									
Conference Type 

									
								

							

						

						
Poster sessions

					

					

						

							

								

									
Promoter 

									
								

							

						

						

					

					

						

							

								

									
Venue 

									
								

							

						

						
名古屋大学

					

					

						

							

								

									
URL 

									
								

							

						

						

					

					

						

							

								

									
Summary