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| Basic information |
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| Name |
Nakatani Tatsuyuki |
| Belonging department |
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| Occupation name |
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| researchmap researcher code |
B000236977 |
| researchmap agency |
Okayama University of Science |
Investigation of a pressure gradient Ar plasma sputtering for metal thin film deposition
Hiroki Oota, Kiyomi Takahashi, Jun-Seok Oh, Kazunori Koga, Tatsuyuki Nakatani, Masafumi Ito, Masaharu Shiratani, Ken Yonezawa
16th International Conference on Plasma Surface Engineering (PSE 2018),
International conferences
in Garmisch-Partenkirchen, Germany,
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