講演・口頭発表等
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Investigation of a pressure gradient Ar plasma sputtering for metal thin film deposition
Hiroki Oota, Kiyomi Takahashi, Jun-Seok Oh, Kazunori Koga, Tatsuyuki Nakatani, Masafumi Ito, Masaharu Shiratani, Ken Yonezawa
16th International Conference on Plasma Surface Engineering (PSE 2018),
2018/09
英語
国際会議
ポスター発表
in Garmisch-Partenkirchen, Germany,
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