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| Basic information |
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| Name |
Nakatani Tatsuyuki |
| Belonging department |
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| Occupation name |
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| researchmap researcher code |
B000236977 |
| researchmap agency |
Okayama University of Science |
Discharge Characteristics of DLC Films using HF-HiPIMS Method
Hiroyuki Fukue, Tadayuki Okano, Masahide Kuroiwa, Tatsuyuki Nakatani
14th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-14) / 26th International Colloquium on Scanning Probe Microscopy (ICSPM26)
Sendai International Center, Sendai, Japan,
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