Conference
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Development of DLC Deposition Technology using HF-HiPIMS Power Supply System
H. Fukue, T. Okano, M. Kuroiwa, S. Kunitsugu and T. Nakatani
28th Annual Meeting of MRS-J, C-3:Frontier of Nano-Materials Based on Advanced Plasma Technologies
2018/12
English
Domestic conferences
Poster sessions
Kitakyushu, Japan
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