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| Basic information |
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| Name |
Nakatani Tatsuyuki |
| Belonging department |
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| Occupation name |
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| researchmap researcher code |
B000236977 |
| researchmap agency |
Okayama University of Science |
Evaluation of unexpected arc discharge characteristic of DLC films formation using HF-HiPIMS power supply
H. Fukue, UT. Okano, M. Kuroiwa, S. Kunitsugu, H. Oota, K. Yonezawa, T. Nakatani
XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) / The 10th International Conference on Reactive Plasmas (ICRP-10)
Sapporo Education and Culture Hall, Sapporo, Hokkaido, Japan
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