Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title

  Influence of DC Substrate Bias Voltage on Deposition of Carbon Nanoparticles Produced by Ar+CH4 Multi-Hollow  Discharge Plasma CVD method

Author

Sung Hwa Hwang, Kunihiro Kamataki, Naho Itagaki, Kazunori Koga, Masaharu Shiratani, Jun Seok OH and Tatsuyuki Nakatani

Journal

XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) / The 10th International Conference on Reactive Plasmas (ICRP-10)

Publication Date

2019/07

Invited

Language

English

Conference Class

Domestic conferences

Conference Type

Verbal presentations (general)

Promoter

Venue

Sapporo Education and Culture Hall, Sapporo, Hokkaido, Japan

URL

Summary