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| Basic information |
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| Name |
Nakatani Tatsuyuki |
| Belonging department |
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| Occupation name |
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| researchmap researcher code |
B000236977 |
| researchmap agency |
Okayama University of Science |
Methane flow rate dependence of plasma emission in DLC films formation using reactive bipolar HiPIMS method
Hiroyuki Fukue, Tadayuki Okano, Masahide Kuroiwa, Shinsuke Kunitsugu, Hiroki Oota, Ken Yonezawa, Tatsuyuki Nakatani
The 11th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-11)
The Kanazawa Chamber of Commerce and Industry, Kanazawa, Japan
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