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| Basic information |
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| Name |
Nakatani Tatsuyuki |
| Belonging department |
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| Occupation name |
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| researchmap researcher code |
B000236977 |
| researchmap agency |
Okayama University of Science |
Developing pressure gradient sputtering system (PGS),
Ken Yonezawa, Hiroki Oota, Jun-Seok Oh, Kazunori Koga, Tatsuyuki Nakatani, Masafumi Ito, and Masaharu Shiratani
he 11th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-11)
The Kanazawa Chamber of Commerce and Industry, Kanazawa, Japan
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