Developing pressure gradient sputtering system (PGS),

Ken Yonezawa, Hiroki Oota, Jun-Seok Oh, Kazunori Koga, Tatsuyuki Nakatani, Masafumi Ito, and Masaharu Shiratani

he 11th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-11)

The Kanazawa Chamber of Commerce and Industry, Kanazawa, Japan