Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Development of TiC Thin Film using Cathodic Arc Ion Plating

					

					

						

							

								

									
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The 30th International Conference of Photopolymer Science and Technology (ICPST-29)/Materials & Processes for Advanced Microlithography, Nanotechnology and Phototechnology

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2013/06

					

					

						

							

								

									
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Conference Type 

									
								

							

						

						
Verbal presentations (invitation, special)

					

					

						

							

								

									
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Venue 

									
								

							

						

						
Chiba,Japan

					

					

						

							

								

									
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Summary