Conference

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

プラズマCVD法を用いたアモルファス炭素膜の堆積過程の赤外分光法観察

					

					

						

							

								

									
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Journal 

									
								

							

						

						
第23回九州・山口プラズマ研究会

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2007/11

					

					

						

							

								

									
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Conference Type 

									
								

							

						

						
Verbal presentations (general)

					

					

						

							

								

									
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Venue 

									
								

							

						

						
九州大学

					

					

						

							

								

									
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Summary