Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Deposition of hydrogen-containing tetrahedral amorphous carbon films by cathodic vacuum arc method

					

					

						

							

								

									
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Author 

									
								

							

						

						
KOUTATOU  SHIRAISHI,  TATSUYUKI NAKATANI  AND SHINSUKE  KUNITSUGU

					

					

						

							

								

									
Summary 

									
								

							

						

						

7th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 8th International Conference on Plasma Nanotechnology and Science (ISPlasma2015 / IC-PLANTS2015)



					

					

						

							

								

									
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Proceedings of the 7th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials  (ISPlasma2015)

					

					

						

							

								

									
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CD-ROM, D3-P-19

					

					

						

							

								

									
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2015/03

					

					

						

							

								

									
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English

					

					

						

							

								

									
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Research papers (proceedings of international meetings)

					

					

						

							

								

									
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