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| 基本情報 |
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| 氏名 |
中谷 達行 |
| 氏名（カナ） |
ﾅｶﾀﾆ ﾀﾂﾕｷ |
| 氏名（英語） |
Nakatani Tatsuyuki |
| 所属 |
機構 研究社会連携機構 ﾌﾛﾝﾃｨｱ理工学研 |
| 職名 |
教授 |
| researchmap研究者コード |
B000236977 |
| researchmap機関 |
岡山理科大学 |
Deposition of hydrogen-containing tetrahedral amorphous carbon films by cathodic vacuum arc method
KOUTATOU SHIRAISHI, TATSUYUKI NAKATANI AND SHINSUKE KUNITSUGU
7th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 8th International Conference on Plasma Nanotechnology and Science (ISPlasma2015 / IC-PLANTS2015)
Proceedings of the 7th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials (ISPlasma2015)
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