Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Deposition and Characterization of Medical ta-C:H Film using Arc Discharge in CH4 /Ar Gas Mixtures

					

					

						

							

								

									
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Author 

									
								

							

						

						
Shinsuke KUNITSUGU, Michio WAKAE and Tatsuyuki NAKATANI

					

					

						

							

								

									
Summary 

									
								

							

						

						





					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Proceedings of the 8th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials (ISPlasma2016)

					

					

						

							

								

									
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07P25

					

					

						

							

								

									
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2016/03

					

					

						

							

								

									
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English

					

					

						

							

								

									
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Research papers (proceedings of international meetings)

					

					

						

							

								

									
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