Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Development of Pulse Power Supplies asHigh Power Impulse Magnetron Sputtering (HiPIMS）Equipment Components for Medical Diamond Like Carbon (DLC) Film Fabrication Processes

					

					

						

							

								

									
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Author 

									
								

							

						

						
Masahide KUROIWA and Tatsuyuki NAKATANI

					

					

						

							

								

									
Summary 

									
								

							

						

						

					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Journal of the Vacuum Society of Japan

					

					

						

							

								

									
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Volume 

									
								

							

						

						
60

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						
9

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
372

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
375

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2017/09

					

					

						

							

								

									
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Language 

									
								

							

						

						
Japanese

					

					

						

							

								

									
Thesis　Type 

									
								

							

						

						
Research papers (other academic conferences' materials and others)

					

					

						

							

								

									
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