Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title

 Influence of Bias Voltage on Substrate Current Density of DLC Films by High-Power Impulse Magnetron Sputtering Method

Bibliography Type

Author

Summary



Hiroyuki Fukue, Tatsuyuki Nakatani, Tadayuki Okano and Masahide Kuroiwa

Magazine(name)

Proceedings of the plasma conference 2017

Publisher

Volume

Number Of Pages

StartingPage

24P-45-1

EndingPage

24P-45-2

Date of Issue

2017/11

Referee

Invited

Language

English

Thesis Type

Research papers (proceedings of international meetings)

ISSN

DOI

NAID

PMID

URL

J-GLOBAL ID

arXiv ID

ORCID Put Code

DBLP ID