Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

 Influence of Bias Voltage on Substrate Current Density of DLC Films by High-Power Impulse Magnetron Sputtering Method

					

					

						

							

								

									
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Hiroyuki Fukue, Tatsuyuki Nakatani, Tadayuki Okano and Masahide Kuroiwa


					

					

						

							

								

									
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Proceedings of the plasma conference 2017

					

					

						

							

								

									
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24P-45-1

					

					

						

							

								

									
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24P-45-2

					

					

						

							

								

									
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2017/11

					

					

						

							

								

									
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English

					

					

						

							

								

									
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Research papers (proceedings of international meetings)

					

					

						

							

								

									
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