Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Influence on discharge properties with the reactive gas in the DLC film formation using the HiPIMS method

					

					

						

							

								

									
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Masahide Kuroiwa, Tadayuki Okano, Tatsuyuki Nakatani, Hiroyuki Fukue


					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Proceedings of the plasma conference 2017

					

					

						

							

								

									
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24P-31-1

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
24P-31-2

					

					

						

							

								

									
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2017/11

					

					

						

							

								

									
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English

					

					

						

							

								

									
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Research papers (proceedings of international meetings)

					

					

						

							

								

									
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