Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Substrate Bias Effects on Amorphous Carbon Film Deposition Process during Acetylene Plasma, Investigated with Infrared Spectroscopy

					

					

						

							

								

									
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Author 

									
								

							

						

						
Masanori Shinohara, Hiroki Kawazoe, Taka-aki Kawakami, Takanori Inayoshi, Yoshinobu Matsuda, Hiroshi Fujiyama, Yuki Nitta, and Tatsuyuki Nakatani

					

					

						

							

								

									
Summary 

									
								

							

						

						





					

					

						

							

								

									
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Transactions of the Materials Research Society of Japan

					

					

						

							

								

									
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Volume 

									
								

							

						

						
35

					

					

						

							

								

									
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3

					

					

						

							

								

									
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563

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
566

					

					

						

							

								

									
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2010/00

					

					

						

							

								

									
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Exist

					

					

						

							

								

									
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English

					

					

						

							

								

									
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Research papers (academic journals)

					

					

						

							

								

									
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