Substrate Bias Effects on Amorphous Carbon Film Deposition Process during Acetylene Plasma, Investigated with Infrared Spectroscopy

Masanori Shinohara, Hiroki Kawazoe, Taka-aki Kawakami, Takanori Inayoshi, Yoshinobu Matsuda, Hiroshi Fujiyama, Yuki Nitta, and Tatsuyuki Nakatani

Transactions of the Materials Research Society of Japan

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