Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Pressure gradient sputtering technology (PGS:High vacuum sputtering)

					

					

						

							

								

									
Bibliography　Type 

									
								

							

						

						

					

					

						

							

								

									
Author 

									
								

							

						

						
Ken Yonezawa, Hiroki Oota, Jun-Seok Oh, Kazunori Koga, Tatsuyuki Nakatani, Masafumi Ito, Masaharu Shiratani

					

					

						

							

								

									
Summary 

									
								

							

						

						





					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
PROCEEDINGS of The 15th International Symposium on Sputtering and Plasma Processes (ISSP2019)

					

					

						

							

								

									
Publisher 

									
								

							

						

						

					

					

						

							

								

									
Volume 

									
								

							

						

						

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
39

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
41

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2019/06

					

					

						

							

								

									
Referee 

									
								

							

						

						

					

					

						

							

								

									
Invited 

									
								

							

						

						

					

					

						

							

								

									
Language 

									
								

							

						

						
English

					

					

						

							

								

									
Thesis　Type 

									
								

							

						

						
Research papers (proceedings of international meetings)

					

					

						

							

								

									
ISSN 

									
								

							

						

						

					

					

						

							

								

									
DOI 

									
								

							

						

						

					

					

						

							

								

									
NAID 

									
								

							

						

						

					

					

						

							

								

									
PMID 

									
								

							

						

						

					

					

						

							

								

									
URL 

									
								

							

						

						

					

					

						

							

								

									
J-GLOBAL ID 

									
								

							

						

						

					

					

						

							

								

									
arXiv ID 

									
								

							

						

						

					

					

						

							

								

									
ORCID Put Code 

									
								

							

						

						

					

					

						

							

								

									
DBLP ID