Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Difference of deposition process of an amorphous carbon film due to source gases

					

					

						

							

								

									
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Author 

									
								

							

						

						
Masanori Shinohara, Hiroki Kawazoe, Takanori Inayoshi, Taka-aki Kawakami Yoshinobu Matsuda, Hiroshi Fujiyama, Yuuki Nitta, Tatsuyuki Nakatani

					

					

						

							

								

									
Summary 

									
								

							

						

						





					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Thin Solid Films

					

					

						

							

								

									
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Volume 

									
								

							

						

						
518

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						
13

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
3497

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
3501

					

					

						

							

								

									
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2010/00

					

					

						

							

								

									
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Exist

					

					

						

							

								

									
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Language 

									
								

							

						

						
English

					

					

						

							

								

									
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Research papers (academic journals)

					

					

						

							

								

									
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