Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Substrate temperature effects on amorphous carbon film growth, investigated by infrared spectroscopy in multiple internal reflection geometry

					

					

						

							

								

									
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Author 

									
								

							

						

						
Masanori Shinohara, Ken Cho, Yoshinobu Matsuda, Takanori Inayoshi, Hiroki Kawazoe, Hiroshi Fujiyama, Yuuki Nitta, and Tatsuyuki Nakatani

					

					

						

							

								

									
Summary 

									
								

							

						

						





					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Journal of Vacuum Science and Technologies A

					

					

						

							

								

									
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Volume 

									
								

							

						

						
27

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						
4

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
813

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
817

					

					

						

							

								

									
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2009/00

					

					

						

							

								

									
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Exist

					

					

						

							

								

									
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Language 

									
								

							

						

						
English

					

					

						

							

								

									
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Research papers (academic journals)

					

					

						

							

								

									
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