Substrate temperature effects on amorphous carbon film growth, investigated by infrared spectroscopy in multiple internal reflection geometry

Masanori Shinohara, Ken Cho, Yoshinobu Matsuda, Takanori Inayoshi, Hiroki Kawazoe, Hiroshi Fujiyama, Yuuki Nitta, and Tatsuyuki Nakatani

Journal of Vacuum Science and Technologies A

27

4

813

817