Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title

Interaction between hydrogen plasma and hydrogenated amorphous carbon film, investigated by infrared spectroscopy

Bibliography Type

Author

M. Shinohara, K. Cho, H. Shibata, K. Okamoto, T. Nakatan, Y. Matsuda, and H.Fujiyama

Summary




Magazine(name)

Thin Solid Films

Publisher

Volume

516

Number Of Pages

13

StartingPage

4379

EndingPage

4383

Date of Issue

2008/00

Referee

Exist

Invited

Language

English

Thesis Type

Research papers (academic journals)

ISSN

DOI

NAID

PMID

URL

J-GLOBAL ID

arXiv ID

ORCID Put Code

DBLP ID