Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Observation of Plasma Chemical Vapor Deposition Process of Amorphous Carbon Film

					

					

						

							

								

									
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Author 

									
								

							

						

						
Masanori SHINOHARA, Yoshinobu MATSUDA, Hiroshi FUJIYAMA and Tatsuyuki NAKATANI

					

					

						

							

								

									
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Magazine(name) 

									
								

							

						

						
表面科学

					

					

						

							

								

									
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Volume 

									
								

							

						

						
31

					

					

						

							

								

									
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3

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
156

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
161

					

					

						

							

								

									
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2010/00

					

					

						

							

								

									
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Exist

					

					

						

							

								

									
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Japanese

					

					

						

							

								

									
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Research papers (academic journals)

					

					

						

							

								

									
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