Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Pulsed Sputter-Coating of Inside Wall of Narrow Tube by Low-Pressure Micro Plasmas in a Magnetic Field

					

					

						

							

								

									
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Author 

									
								

							

						

						
H. Fujiyama, H. Uchida, Y. Nitta, T. Nakatani

					

					

						

							

								

									
Summary 

									
								

							

						

						
The 4th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology

					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
Proceedings of the 4th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-4)

					

					

						

							

								

									
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StartingPage 

									
								

							

						

						
57

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
61

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
2005/12

					

					

						

							

								

									
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Language 

									
								

							

						

						
English

					

					

						

							

								

									
Thesis　Type 

									
								

							

						

						
Research papers (proceedings of international meetings)

					

					

						

							

								

									
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