Pulsed Sputter-Coating of Inside Wall of Narrow Tube by Low-Pressure Micro Plasmas in a Magnetic Field

H. Fujiyama, H. Uchida, Y. Nitta, T. Nakatani

The 4th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology

Proceedings of the 4th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-4)

57

61