Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Inner Wall Coating of Narrow Tube by Low-pressure and High Frequency Microplasmas

					

					

						

							

								

									
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Author 

									
								

							

						

						
Y. Nitta, H. Uchida, T. Nakatani, H. Fujiyama

					

					

						

							

								

									
Summary 

									
								

							

						

						
The 6th International Conference on Reactive Plasmas /23rd Symposium on Plasma Processing

					

					

						

							

								

									
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Proceedings of the 6th International Conference on Reactive Plasmas /23rd Symposium on Plasma Processing (ICRP-6 / SPP-23)

					

					

						

							

								

									
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699

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
700

					

					

						

							

								

									
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2006/01

					

					

						

							

								

									
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Language 

									
								

							

						

						
English

					

					

						

							

								

									
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Research papers (proceedings of international meetings)

					

					

						

							

								

									
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