Academic Thesis

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Title 

Functional Sputter-Coatings of Inner Surface of Narrow Tubes by the Second Harmonic Electron Cyclotron Resonance Plasmas

					

					

						

							

								

									
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Author 

									
								

							

						

						
H. Fujiyama, T. Nakatani, H. Uchida and Y. Nitta

					

					

						

							

								

									
Summary 

									
								

							

						

						

The 9th Joint Symposium of Nagasaki University and Cheju National University on Science and Technology



					

					

						

							

								

									
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Proceedings of the 9th Joint Symposium of Nagasaki University and Cheju National University on Science and Technology (JSST2006)

					

					

						

							

								

									
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159

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
162

					

					

						

							

								

									
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2006/00

					

					

						

							

								

									
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Language 

									
								

							

						

						
English

					

					

						

							

								

									
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Research papers (proceedings of international meetings)

					

					

						

							

								

									
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