Functional Sputter-Coatings of Inner Surface of Narrow Tubes by the Second Harmonic Electron Cyclotron Resonance Plasmas

H. Fujiyama, T. Nakatani, H. Uchida and Y. Nitta

The 9th Joint Symposium of Nagasaki University and Cheju National University on Science and Technology

Proceedings of the 9th Joint Symposium of Nagasaki University and Cheju National University on Science and Technology (JSST2006)

159

162