Patents

Basic information

Name Nakatani Tatsuyuki
Belonging department
Occupation name
researchmap researcher code B000236977
researchmap agency Okayama University of Science

Name 

スパッタ装置用カソードユニット

					

					

						

							

								

									
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米澤健，高橋希世美，太田裕己，呉準席，伊藤昌文，古閑一憲，白谷正治，中谷達行

					

					

						

							

								

									
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特願2018-27964

					

					

						

							

								

									
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2018/02

					

					

						

							

								

									
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