Conference

Basic information

Name Terano Motoki
Belonging department
Occupation name
researchmap researcher code 7000018142
researchmap agency Okayama University of Science

Title 

シリコンの微細切削における加工変質層に及ぼす高静水圧の影響

					

					

						

							

								

									
Author 

									
								

							

						

						
河野健太郎, 吉野 雅彦, 寺野元規

					

					

						

							

								

									
Journal 

									
								

							

						

						
機械学会第５回マイクロナノ工学シンポジウム

					

					

						

							

								

									
Publication Date 

									
								

							

						

						
2013

					

					

						

							

								

									
Invited 

									
								

							

						

						

					

					

						

							

								

									
Language 

									
								

							

						

						
Japanese

					

					

						

							

								

									
  

									
								

							

						

						
学会講演(シンポジウム・セミナー含む)

					

					

						

							

								

									
Conference Class 

									
								

							

						

						
Domestic conferences

					

					

						

							

								

									
Conference Type 

									
								

							

						

						
Verbal presentations (general)

					

					

						

							

								

									
Promoter 

									
								

							

						

						

					

					

						

							

								

									
Venue 

									
								

							

						

						

					

					

						

							

								

									
URL 

									
								

							

						

						

					

					

						

							

								

									
Summary