Studies on Opto-Pneumatic Servo System (3nd Report, Theoretical Analysis of Control System and Control Performance)
Tetsuya AKAGI, Shujiro DOHTA and Hisashi MATSUSHITA
Modeling, Optical Servo System, Photo-Fluidic Interface, Environment Hazards, Booster Amplifier, Pneumatic Cylinder, Position Control,Positioning Accuracy, Fluidics, Laser Beam
日本機械学会論文集(C編)
日本機械学会
64
622
2041
2048