Academic Thesis

Basic information

Name Hirano Hiroyuki
Belonging department
Occupation name
researchmap researcher code 1000215136
researchmap agency Okayama University of Science

Title 

Calculation of the Deposition Velocity of a Particle onto a Wafer

					

					

						

							

								

									
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Author 

									
								

							

						

						
Hiroyuki Hirano and Hiroyuki Ozoe

					

					

						

							

								

									
Summary 

									
								

							

						

						
numerical fluid dynamics,particle deposition

					

					

						

							

								

									
Magazine(name) 

									
								

							

						

						
化学工学論文集

					

					

						

							

								

									
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Volume 

									
								

							

						

						
19

					

					

						

							

								

									
Number Of Pages 

									
								

							

						

						
4

					

					

						

							

								

									
StartingPage 

									
								

							

						

						
595

					

					

						

							

								

									
EndingPage 

									
								

							

						

						
604

					

					

						

							

								

									
Date of Issue 

									
								

							

						

						
1993/07

					

					

						

							

								

									
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Invited 

									
								

							

						

						
Not exist

					

					

						

							

								

									
Language 

									
								

							

						

						
Japanese

					

					

						

							

								

									
Thesis　Type 

									
								

							

						

						
Research papers (academic journals)

					

					

						

							

								

									
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